summaryrefslogtreecommitdiffstats
path: root/inf/rn/dok/lyx/thesisExample.bib
blob: 250e6aa7018d455952e2054e641136874f4f97ac (plain) (blame)
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
135
136
137
138
139
140
141
142
143
144
145
146
147
148
149
150
151
152
153
154
155
156
157
158
159
160
161
162
163
164
165
166
167
168
169
170
171
172
173
174
175
176
177
178
179
180
181
182
183
184
185
186
187
188
189
190
191
192
193
194
195
196
197
198
199
200
201
202
203
204
205
206
207
208
209
210
211
212
213
214
215
216
217
218
219
220
221
222
223
224
225
226
227
228
229
230
231
232
233
234
235
236
237
238
239
240
241
242
243
244
245
246
247
248
249
250
251
252
253
254
255
256
257
258
259
260
261
262
263
264
265
266
267
268
269
270
271
272
273
274
275
276
277
278
279
280
281
282
283
284
285
286
287
288
289
290
291
292
293
294
295
296
297
298
299
300
301
302
303
304
305
306
307
308
309
310
311
312
313
314
315
316
317
318
319
320
321
322
323
324
325
326
327
328
329
330
331
332
333
334
335
336
337
338
339
340
341
342
343
344
345
346
347
348
349
350
351
352
353
354
355
356
357
358
359
360
361
362
363
364
365
366
367
368
369
370
371
372
373
374
375
376
377
378
379
380
381
382
383
384
385
386
387
388
389
390
391
392
393
394
395
396
397
398
399
400
401
402
403
404
405
406
407
408
409
410
411
412
413
414
415
416
417
418
419
420
421
422
423
424
425
426
427
428
429
430
431
432
433
434
435
436
437
438
439
440
441
442
443
444
445
446
447
448
449
450
451
452
453
454
455
456
457
458
459
460
461
462
463
464
465
466
467
468
469
470
471
472
473
474
475
476
477
478
479
480
481
482
483
484
485
486
487
488
489
490
491
492
493
494
495
496
497
498
499
500
501
502
503
504
505
506
507
508
509
510
511
512
513
514
515
516
517
518
519
520
521
522
523
524
525
526
527
528
529
530
531
532
533
534
535
536
537
538
539
540
541
542
543
544
545
546
547
548
549
550
551
552
553
554
555
556
557
558
559
560
561
562
563
564
565
566
567
568
569
570
571
572
573
574
575
576
577
578
579
580
581
582
583
584
585
586
587
588
589
590
591
592
593
594
595
596
597
598
599
600
601
602
603
604
605
606
607
608
609
610
611
612
613
614
615
616
617
618
619
620
621
622
623
624
625
626
627
628
629
630
631
632
633
634
635
636
637
638
639
640
641
642
643
644
645
646
647
648
649
650
651
652
653
654
655
656
657
658
659
660
661
662
663
664
665
666
667
668
669
670
671
672
673
674
675
676
677
678
679
680
681
682
683
684
685
686
687
688
689
690
691
692
693
694
695
696
697
698
699
700
701
702
703
704
705
706
707
708
709
710
711
712
713
714
715
716
717
718
719
720
721
722
723
724
725
726
727
728
729
730
731
732
733
734
735
736
737
738
739
740
741
742
743
744
745
746
747
748
749
750
751
752
753
754
755
756
757
758
759
760
761
762
763
764
765
766
767
768
769
770
771
772
773
774
775
776
777
778
779
780
781
782
783
784
785
786
787
788
789
790
791
792
793
794
795
796
797
798
799
800
801
802
803
804
805
806
807
808
809
810
811
812
813
814
815
816
817
818
819
820
821
822
823
824
825
826
827
828
829
830
831
832
833
834
835
836
837
838
839
840
841
842
843
844
845
846
847
848
849
850
851
852
853
854
855
856
857
858
859
860
861
862
863
864
865
866
867
868
869
870
871
872
873
874
875
876
877
878
879
880
881
882
883
884
885
886
887
888
889
890
891
892
893
894
895
896
897
898
899
900
901
902
903
904
905
906
907
908
909
910
911
912
913
914
915
916
917
918
919
920
921
922
923
924
925
926
927
928
929
930
931
932
933
934
935
936
937
938
939
940
941
942
943
944
945
946
947
948
949
950
951
952
953
954
955
956
957
958
959
960
961
962
963
964
965
966
967
968
969
970
971
972
973
974
975
976
977
978
979
980
981
982
983
984
985
986
987
988
989
990
991
992
993
994
995
996
997
998
999
1000
1001
1002
1003
1004
1005
1006
1007
1008
1009
1010
1011
1012
1013
1014
1015
1016
1017
1018
1019
1020
1021
1022
1023
1024
1025
1026
1027
1028
1029
1030
1031
1032
1033
1034
1035
1036
1037
1038
1039
1040
1041
1042
1043
1044
1045
1046
1047
1048
1049
1050
1051
1052
1053
1054
1055
1056
1057
1058
1059
1060
1061
1062
1063
1064
1065
1066
1067
1068
1069
1070
1071
1072
1073
1074
1075
1076
1077
1078
1079
1080
1081
1082
1083
1084
1085
1086
1087
1088
1089
1090
1091
1092
1093
1094
1095
1096
1097
1098
1099
1100
1101
1102
1103
1104
1105
1106
1107
1108
1109
1110
1111
1112
1113
1114
1115
1116
1117
1118
1119
1120
1121
1122
1123
1124
1125
1126
1127
1128
1129
1130
1131
1132
1133
1134
1135
1136
1137
1138
1139
1140
1141
1142
1143
1144
1145
1146
1147
1148
1149
1150
1151
1152
1153
1154
1155
1156
1157
1158
1159
1160
1161
1162
1163
1164
1165
1166
1167
1168
1169
1170
1171
1172
1173
1174
1175
1176
1177
1178
1179
1180
1181
1182
1183
1184
1185
1186
1187
1188
1189
1190
1191
1192
1193
1194
1195
1196
1197
1198
1199
1200
1201
1202
1203
1204
1205
1206
1207
1208
1209
1210
1211
1212
1213
1214
1215
1216
1217
1218
1219
1220
1221
1222
1223
1224
1225
1226
1227
1228
1229
1230
1231
1232
1233
1234
1235
1236
1237
1238
1239
1240
1241
1242
1243
1244
1245
1246
1247
1248
1249
1250
1251
1252
1253
1254
1255
1256
1257
1258
1259
1260
1261
1262
1263
1264
1265
1266
1267
1268
1269
1270
1271
1272
1273
1274
1275
1276
1277
1278
1279
1280
1281
1282
1283
1284
1285
1286
1287
1288
1289
1290
1291
1292
1293
1294
1295
1296
1297
1298
1299
1300
1301
1302
1303
1304
1305
1306
1307
1308
1309
1310
1311
1312
1313
1314
1315
1316
1317
1318
1319
1320
1321
1322
1323
1324
1325
1326
1327
1328
1329
1330
1331
1332
1333
1334
1335
1336
1337
1338
1339
1340
1341
1342
1343
1344
1345
1346
1347
1348
1349
1350
1351
1352
1353
1354
1355
1356
1357
1358
1359
1360
1361
1362
1363
1364
1365
1366
1367
1368
1369
1370
1371
1372
1373
1374
1375
1376
1377
1378
1379
1380
1381
1382
1383
1384
1385
1386
1387
1388
1389
1390
1391
1392
1393
1394
1395
1396
1397
1398
1399
1400
1401
1402
1403
1404
1405
1406
1407
1408
1409
1410
1411
1412
1413
1414
1415
1416
1417
1418
1419
1420
1421
1422
1423
1424
1425
1426
1427
1428
1429
1430
1431
1432
1433
1434
1435
1436
1437
1438
1439
1440
1441
1442
1443
1444
1445
1446
1447
1448
1449
1450
1451
1452
1453
1454
1455
1456
1457
1458
1459
1460
1461
1462
1463
1464
1465
1466
1467
1468
1469
1470
1471
1472
1473
1474
1475
1476
1477
1478
1479
1480
1481
1482
1483
1484
1485
1486
1487
1488
1489
1490
1491
1492
1493
1494
1495
1496
1497
1498
1499
1500
1501
1502
1503
1504
1505
1506
1507
1508
1509
1510
1511
1512
1513
1514
1515
1516
1517
1518
1519
1520
1521
1522
1523
1524
1525
1526
1527
1528
1529
1530
1531
1532
1533
1534
1535
1536
1537
1538
1539
1540
1541
1542
1543
1544
1545
1546
1547
1548
1549
1550
1551
1552
1553
1554
1555
1556
1557
1558
1559
1560
1561
1562
1563
1564
1565
1566
1567
1568
1569
1570
1571
1572
1573
1574
1575
1576
1577
1578
1579
1580
1581
1582
1583
1584
1585
1586
1587
1588
1589
1590
1591
1592
1593
1594
1595
1596
1597
1598
1599
1600
1601
1602
1603
1604
1605
1606
1607
1608
1609
1610
1611
1612
1613
1614
1615
1616
1617
1618
1619
1620
1621
1622
1623
1624
1625
1626
1627
1628
1629
1630
1631
1632
1633
1634
1635
1636
1637
1638
1639
1640
1641
1642
1643
1644
1645
1646
1647
1648
1649
1650
1651
1652
1653
1654
1655
1656
1657
1658
1659
1660
1661
1662
1663
1664
1665
1666
1667
1668
1669
1670
1671
1672
1673
1674
1675
1676
1677
1678
1679
1680
1681
1682
1683
1684
1685
1686
1687
1688
1689
1690
1691
1692
1693
1694
1695
1696
1697
1698
1699
1700
1701
1702
1703
1704
1705
1706
1707
1708
1709
1710
1711
1712
1713
1714
1715
1716
1717
1718
1719
1720
1721
1722
1723
1724
1725
1726
1727
1728
1729
1730
1731
1732
1733
1734
1735
1736
1737
1738
1739
1740
1741
1742
1743
1744
1745
1746
1747
1748
1749
1750
1751
1752
1753
1754
1755
1756
1757
1758
1759
1760
1761
1762
1763
1764
1765
1766
1767
1768
1769
1770
1771
1772
1773
1774
1775
1776
1777
1778
1779
1780
1781
1782
1783
1784
1785
1786
1787
1788
1789
1790
1791
1792
1793
1794
1795
1796
1797
1798
1799
1800
1801
1802
1803
1804
1805
1806
1807
1808
1809
1810
1811
1812
1813
1814
1815
1816
1817
1818
1819
1820
1821
1822
1823
1824
1825
1826
1827
1828
1829
1830
1831
1832
1833
1834
1835
1836
1837
1838
1839
1840
1841
1842
1843
1844
1845
1846
1847
1848
1849
1850
1851
1852
1853
1854
1855
1856
1857
1858
1859
1860
1861
1862
1863
1864
1865
1866
1867
1868
1869
1870
1871
1872
1873
1874
1875
1876
1877
1878
1879
1880
1881
1882
1883
1884
1885
1886
1887
1888
1889
1890
1891
1892
1893
1894
1895
1896
1897
1898
1899
1900
1901
1902
1903
1904
1905
1906
1907
1908
1909
1910
1911
1912
1913
1914
1915
1916
1917
1918
1919
1920
1921
1922
1923
1924
1925
1926
1927
1928
1929
1930
1931
1932
1933
1934
1935
1936
1937
1938
1939
1940
1941
1942
1943
1944
1945
1946
1947
1948
1949
1950
1951
1952
1953
1954
1955
1956
1957
1958
1959
1960
1961
1962
1963
1964
1965
1966
1967
1968
1969
1970
1971
1972
1973
1974
1975
1976
1977
1978
1979
1980
1981
1982
1983
1984
1985
1986
1987
1988
1989
1990
1991
1992
1993
1994
1995
1996
1997
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
2025
2026
2027
2028
2029
2030
2031
2032
2033
2034
2035
2036
2037
2038
2039
2040
2041
2042
2043
2044
2045
2046
2047
2048
2049
2050
2051
2052
2053
2054
2055
2056
2057
2058
2059
2060
2061
2062
2063
2064
2065
2066
2067
2068
2069
2070
2071
2072
2073
2074
2075
2076
2077
2078
2079
2080
2081
2082
2083
2084
2085
2086
2087
2088
2089
2090
2091
2092
2093
2094
2095
2096
2097
2098
2099
2100
2101
2102
2103
2104
2105
2106
2107
2108
2109
2110
2111
2112
2113
2114
2115
2116
2117
2118
2119
2120
2121
2122
2123
2124
2125
2126
% This file was created with JabRef 2.5.
% Encoding: Cp1252

@ARTICLE{Abgr07,
  author = {P. Abgrall and A.-M. Gué},
  title = {Lab-on-chip technologies: making a microfluidic network and coupling
	it into a complete microsystem---a review},
  journal = {J. Micromech. Microeng.},
  year = {2007},
  volume = {17},
  pages = {R15\,-\,R49},
  doi = {10.1088/0960-1317/17/5/R01},
  file = {Abgrall07-Review.pdf:Photolacke\\Abgrall07-Review.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/17/5/R01}
}

@ARTICLE{Abgr06,
  author = {P. Abgrall and others},
  title = {A novel fabrication method of flexible and monolithic {3D microfluidic
	structures using lamination of SU-8} films},
  journal = {J. Micromech. Microeng.},
  year = {2006},
  volume = {16},
  pages = {113\,-\,121},
  doi = {10.1088/0960-1317/16/1/016},
  file = {SU-8-selbst-hergestellt.pdf:Photolacke\\SU-8-selbst-hergestellt.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/16/1/016}
}

@ARTICLE{Abol05,
  author = {S.N. Abolmasov and T. Shirafuji and K. Tachibana},
  title = {Submillimeter Dielectric Barrier Discharges at Atmospheric Pressure:
	Edge Effect},
  journal = {IEEE Trans. Plasma Sci.},
  year = {2005},
  volume = {33},
  pages = {941\,-\,948},
  doi = {10.1109/TPS.2005.845093},
  file = {Abolmasov-submillimeter-discharge-2005.pdf:DBD\\Abolmasov-submillimeter-discharge-2005.pdf:PDF},
  review = {Priorität 1
	
	Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.},
  url = {http://dx.doi.org/10.1109/TPS.2005.845093}
}

@ARTICLE{Akis03,
  author = {Yu.S. Akishev and A.V. Dem\textrm{'}yanov and V.B. Karal\textrm{'}nik
	and A.E. Monich and N.I. Trushkin},
  title = {Comparison of the AC Barrier Corona with DC Positive and Negative
	Coronas and Barrier Discharge},
  journal = {Plasma Physics Reports},
  year = {2003},
  volume = {29},
  pages = {90\,-\,100},
  doi = {10.1134/1.1538505},
  file = {Akishev-Comparison-BC-dischages-2003.pdf:DBD\\Akishev-Comparison-BC-dischages-2003.pdf:PDF},
  url = {http://www.triniti.ru/CTF\&VM/Articles/Demyanov3.pdf}
}

@ARTICLE{Baba01,
  author = {S.E. Babayan and others},
  title = {Deposition of silicon dioxide films with a non-equilibrium atmospheric-pressure
	plasma jet},
  journal = {Plasma Sources Sci. Technol.},
  year = {2001},
  volume = {10},
  pages = {573\,-\,578},
  number = {4},
  doi = {10.1088/0963-0252/10/4/305},
  file = {:DBD\\Babayan-SiOx-2001.pdf:PDF},
  publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
	c1991-},
  url = {http://dx.doi.org/10.1088/0963-0252/10/4/305}
}

@ARTICLE{Beck06,
  author = {K.H. Becker and K.H. Schoenbach and J.G. Eden},
  title = {Microplasmas and applications},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2006},
  volume = {39},
  pages = {R55\,-\,R70},
  doi = {10.1088/0022-3727/39/3/R01},
  file = {:DBD\\Becker_Overview microplasmas-2006.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0022-3727/39/3/R01}
}

@ARTICLE{Bile04,
  author = {B. Bilenberg and T. Nielsen and B. Clausen and A. Kristensen},
  title = {PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with
	integrated optics},
  journal = {J. Micromech. Microeng.},
  year = {2004},
  volume = {14},
  pages = {814\,-\,818},
  doi = {10.1088/0960-1317/14/6/008},
  file = {Bile04.pdf:Photolacke\\Bile04.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/14/6/008}
}

@ARTICLE{Blan04,
  author = {F. J. Blanco and others},
  title = {Novel three-dimensional embedded {SU-8} microchannels fabricated
	using a low temperature full wafer adhesive bonding},
  journal = {J. Micromech. Microeng.},
  year = {2004},
  volume = {14},
  pages = {1047\,-\,1056},
  doi = {10.1088/0960-1317/14/7/027},
  file = {Blan04.pdf:Photolacke\\Blan04.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/14/7/027}
}

@ARTICLE{Boga02,
  author = {A. Bogaerts and E. Neyts and R. Gijbels and J. van der Mullen},
  title = {Gas discharge plasmas and their applications},
  journal = {Spectrochim. Acta. B Atom. Spectros.},
  year = {2002},
  volume = {57},
  pages = {609--658},
  number = {4},
  doi = {10.1016/S0584-8547(01)00406-2},
  file = {:Allgemein\\2002_gas discharge plasmas and their applications.pdf:PDF},
  publisher = {Elsevier},
  url = {\href{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}}
}

@BOOK{Bohl1989,
  title = {Technische Strömungslehre},
  publisher = {Vogel-Verlag, Würzburg},
  year = {1989},
  author = {Willi Bohl},
  edition = {8th},
  url = {http://www.worldcat.org/oclc/315749265}
}

@ARTICLE{Bran07,
  author = {R. Brandenburg and others},
  title = {Antimicrobial Treatment of Heat Sensitive Materials by Means of Atmospheric
	Pressure {Rf}-Driven Plasma Jet},
  journal = {Contrib. Plasma Phys.},
  year = {2007},
  volume = {47},
  pages = {72\,-\,79},
  doi = {10.1002/ctpp.200710011},
  file = {:DBD\\Brandenburg07-PlasmaJet-microbial.pdf:PDF},
  url = {http://dx.doi.org/10.1002/ctpp.200710011}
}

@ARTICLE{Bran05,
  author = {R. Brandenburg and H.-E. Wagner and A.M. Morozov and K.V. Kozlov},
  title = {Axial and radial development of microdischarges of barrier discharges
	in {N2/O2} mixtures at atmospheric pressure},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2005},
  volume = {38},
  pages = {1649\,-\,1657},
  number = {11},
  doi = {10.1088/0022-3727/38/11/003},
  file = {:DBD\\Brandenburg-DBD-characteristics-05.pdf:PDF},
  publisher = {London: The Institute of Physics and The Physical Society.},
  url = {http://dx.doi.org/10.1088/0022-3727/38/11/003}
}

@CONFERENCE{Brea09,
  author = {M.C. Breadmore and E. Candish and R.M. Guijt},
  title = {Dry film photoresist, saving time and money without compromising
	on performance},
  booktitle = {\textmu TAS 2009},
  year = {2009}
}

@BOOK{Bruu08,
  title = {Theoretical Microfluidics},
  publisher = {Oxford University Press},
  year = {2008},
  author = {Henrik Bruus},
  url = {http://www.worldcat.org/oclc/176807166}
}

@ARTICLE{Bull01,
  author = {N.A. Bullett and others},
  title = {Direct imaging of plasma-polymerized chemical micropatterns},
  journal = {Surf. Interface Anal.},
  year = {2001},
  volume = {31},
  pages = {1074\,-\,1076},
  number = {11},
  doi = {10.1002/sia.1146},
  file = {:DBD\\Bullett-SEM mask pattern-2001.pdf:PDF},
  url = {http://dx.doi.org/10.1002/sia.1146}
}

@ARTICLE{Carl04,
  author = {J. Carlier and others},
  title = {Integrated microfluidics based on multi-layered SU-8 for mass spectrometry
	analysis},
  journal = {J. Micromech. Microeng.},
  year = {2004},
  volume = {14},
  pages = {619\,-\,624},
  doi = {10.1088/0960-1317/14/4/024},
  file = {Carlier04.pdf:Photolacke\\Carlier04.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/14/4/024}
}

@ARTICLE{Carl1977,
  author = {Carlsson, DJ and Garton, A. and Wiles, DM},
  title = {The weatherability of polypropylene monofilaments. Effects of fiber
	production conditions},
  journal = {Journal of Applied Polymer Science},
  year = {1977},
  volume = {21},
  pages = {2963\,-\,2978},
  number = {11},
  doi = {10.1002/app.1977.070211112},
  file = {:DBD\\Carlsson-PP-oxidation-1977.pdf:PDF},
  publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
  url = {http://dx.doi.org/10.1002/app.1977.070211112}
}

@ARTICLE{Carr1903,
  author = {W.R. Carr},
  title = {On the Laws Governing Electric Discharges in Gases at Low Pressures},
  journal = {Phil. Trans. Roy. Soc. Lond. Math. Phys. Sci.},
  year = {1903},
  volume = {201},
  pages = {403-433},
  doi = {10.1098/rsta.1903.0020},
  file = {:DBD\\Carr-Electric dischare at low pressure-1903.pdf:PDF},
  url = {http://dx.doi.org/10.1098/rsta.1903.0020}
}

@ARTICLE{Chang00,
  author = {H.-K. Chang and Y.-K. Kim},
  title = {{UV-LIGA process for high aspect ratio structure using stress barrier
	and C-shaped etch hole}},
  journal = {Sensors and Actuators A},
  year = {2000},
  volume = {84},
  pages = {342\,-\,350},
  doi = {10.1016/S0924-4247(00)00408-8},
  file = {SU-8-Aspektverhaeltnis-Springer.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Springer.pdf:PDF},
  url = {\href{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}}
}

@ARTICLE{Char1967,
  author = {F.M. Charbonnier and C.J. Bennette and L.W.~Swanson},
  title = {Electrical Breakdown between Metal Electrodes in High Vacuum. I.
	Theory},
  journal = {J. Appl. Phys.},
  year = {1967},
  volume = {38},
  pages = {627\,-\,633},
  doi = {10.1063/1.1709385},
  file = {:DBD\\Charbonnier-Breakdown-1967.pdf:PDF},
  publisher = {AIP},
  url = {http://dx.doi.org/10.1063/1.1709385}
}

@ARTICLE{Char1967-2,
  author = {F.M. Charbonnier and C.J. Bennette and L.W. Swanson},
  title = {Electrical Breakdown between Metal Electrodes in High Vacuum. II.
	Experimental},
  journal = {J. Appl. Phys.},
  year = {1967},
  volume = {38},
  pages = {634\,-\,640},
  doi = {10.1063/1.1709386},
  file = {:DBD\\Charbonnier-Breakdown-1967-2.pdf:PDF},
  publisher = {AIP},
  url = {http://dx.doi.org/10.1063/1.1709386}
}

@ARTICLE{Coog1996,
  author = {J.J. Coogan and A.D. Sappey},
  title = {Distribution of {OH} within silent discharge plasma reactors},
  journal = {IEEE Trans. Plasma Sci.},
  year = {1996},
  volume = {24},
  pages = {91\,-\,92},
  number = {1},
  doi = {10.1109/27.491706},
  file = {:DBD\\Coogan-FilamentDiameter-1996.pdf:PDF},
  url = {http://dx.doi.org/10.1109/27.491706}
}

@ARTICLE{Cutl1993,
  author = {P. Cutler},
  title = {Theory of electron emission in high fields from atomically sharp
	emitters: Validity of the Fowler-Nordheim equation},
  journal = {Progress in Surface Science},
  year = {1993},
  volume = {42},
  pages = {169\,-\,185},
  number = {1-4},
  doi = {10.1016/0079-6816(93)90068-7},
  file = {:DBD\\Cutler-Emission in high fields-1993.pdf:PDF},
  url = {\href{http://dx.doi.org/10.1016/0079-6816(93)90068-7}{http://dx.doi.org/10.1016/0079-6816(93)90068-7}}
}

@BOOK{Davi1998,
  title = {Metals handbook: desk edition},
  publisher = {ASM International},
  year = {1998},
  author = {J.R. Davis},
  pages = {1128},
  edition = {2nd}
}

@ARTICLE{Dikm04,
  author = {A.J. Dikmans and others},
  title = {A new compact disc format of high density array synthesis applied
	to peptide nucleic acids and in situ {MALDI} analysis},
  journal = {Molecular diversity},
  year = {2004},
  volume = {8},
  pages = {197\,-\,207},
  number = {3},
  doi = {10.1023/B:MODI.0000036234.66238.4e},
  file = {:Allgemein\\Dikmans-Amino-array-2004.pdf:PDF},
  url = {http://dx.doi.org/10.1023/B:MODI.0000036234.66238.4e}
}

@PHDTHESIS{Dora02,
  author = {Rajesh Dorai},
  title = {Modeling of Atmospheric Pressure Plasma Processing of Gases and Surfaces},
  school = {University of Illinois at Urbana-Champaign},
  year = {2002},
  file = {:DBD\\Dorai-plasma-reactions-2002.pdf:PDF},
  url = {http://uigelz.eecs.umich.edu/pub/theses/rajesh_phd_thesis.pdf}
}

@ARTICLE{Dora03,
  author = {R. Dorai and M.J. Kushner},
  title = {A model for plasma modification of polypropylene using atmospheric
	pressure discharges},
  journal = {J. Phys. D: Appl. Phys},
  year = {2003},
  volume = {36},
  pages = {666\,-\,685},
  number = {6},
  doi = {10.1088/0022-3727/36/6/309},
  file = {:DBD\\Dorai-PP-Surface-chemistry-2003.pdf:PDF},
  publisher = {IOP PUBLISHING LTD},
  url = {http://dx.doi.org/10.1088/0022-3727/36/6/309}
}

@ARTICLE{Dush1923,
  author = {S. Dushman},
  title = {Electron Emission from Metals as a Function of Temperature},
  journal = {Physical Review},
  year = {1923},
  volume = {21},
  pages = {623\,-\,636},
  doi = {10.1103/PhysRev.21.623},
  file = {:DBD\\Dushman-Thermionic-Emission-1923.pdf:PDF},
  publisher = {APS},
  url = {http://dx.doi.org/10.1103/PhysRev.21.623}
}

@ARTICLE{Eden03,
  author = {J.G. Eden and others},
  title = {Microplasma devices fabricated in silicon, ceramic, and metal/polymer
	structures: arrays, emitters and photodetectors},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2003},
  volume = {36},
  pages = {2869\,-\,2877},
  doi = {10.1088/0022-3727/36/23/001},
  file = {:DBD\\Eden-Cavity Silicon-2003.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0022-3727/36/23/001}
}

@CONFERENCE{Eich05,
  author = {M. Eichler and M. Thomas and H. Mewes and C.-P. Klages},
  title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden
	bei niedrigen Temperaturen}},
  booktitle = {Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg.
	Berlin: VDE-Verlag, 2005, pp. 115-118},
  year = {2005},
  file = {Waferbonden_Eichler.pdf:DBD\\Waferbonden_Eichler.pdf:PDF},
  url = {http://www.vde-verlag.de/data/buecher.php?action=bookdetail\&vertriebsnr=562926}
}

@ARTICLE{Elia1991,
  author = {B. Eliasson and U. Kogelschatz},
  title = {Modeling and applications of silent discharge plasmas},
  journal = {IEEE Trans. Plasma Sci.},
  year = {1991},
  volume = {19},
  pages = {309\,-\,323},
  number = {2},
  doi = {10.1109/27.106829},
  file = {:DBD\\Eliasson-Modelling-1991.pdf:PDF},
  url = {http://dx.doi.org/10.1109/27.106829}
}

@ARTICLE{Klei03,
  author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others},
  title = {NMR Spectroscopy Characterization and Self-Diffusion Study of Partially
	Swollen Polymer Networks.},
  journal = {Macromol. Chem. Phys.},
  year = {2003},
  volume = {204},
  pages = {F24\,-\,F25}
}

@INPROCEEDINGS{Fahl01,
  author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr},
  title = {Deposition of multilayer optical coatings onto plastic webs by pulse
	magnetron sputtering; challenges and opportunities},
  booktitle = {Proceedings 6th. International Symposium on Sputtering and Plasma
	Processes (ISSP), p. 189, Kanazawa, Japan},
  year = {2001},
  file = {:Allgemein\\Fahrland-Sputtering-2001.pdf:PDF}
}

@CONFERENCE{Flac02,
  author = {W.W. Flack and H.A. Nguyen and E. Capsuto},
  title = {Characterization of a novel photoresist redistribution material for
	advanced packaging applications},
  booktitle = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference
	Series},
  year = {2002},
  volume = {4690},
  pages = {1203\,-\,1216},
  doi = {10.1117/12.474198},
  file = {:Photolacke\\SINR-resist-2002.pdf:PDF},
  url = {http://dx.doi.org/10.1117/12.474198}
}

@ARTICLE{Forb1999,
  author = {R.G. Forbes},
  title = {Refining the application of Fowler-Nordheim theory},
  journal = {Ultramicroscopy},
  year = {1999},
  volume = {79},
  pages = {11\,-\,23},
  doi = {10.1016/S0304-3991(99)00097-2},
  file = {:DBD\\Forbes - Refining the application of Fowler-Nordheim theory.pdf:PDF},
  url = {http://dx.doi.org/10.1016/S0304-3991(99)00097-2}
}

@ARTICLE{Fowl1928,
  author = {R.H. Fowler and L. Nordheim},
  title = {Electron Emission in Intense Electric Fields},
  journal = {Proceedings of the Royal Society of London. Series A, Containing
	Papers of a Mathematical and Physical Character},
  year = {1928},
  volume = {119},
  pages = {173\,-\,181},
  number = {781},
  month = {May},
  file = {:DBD\\Fowler-Nordheim-1928.pdf:PDF},
  url = {http://www.jstor.org/pss/95023}
}

@ARTICLE{Gabo1993,
  author = {S.R. Gaboury and M.W. Urban},
  title = {Microwave plasma reactions of solid monomers with silicone elastomer
	surfaces: a spectroscopic study},
  journal = {Langmuir},
  year = {1993},
  volume = {9},
  pages = {3225\,-\,3233},
  number = {11},
  doi = {10.1021/la00035a076},
  file = {:DBD\\Gaboury-Epoxy-on-PDMS-1993.pdf:PDF},
  publisher = {American Chemical Society},
  url = {http://dx.doi.org/10.1021/la00035a076}
}

@MISC{GEKA,
  author = {{GEKA~mbH}},
  title = {Destroying chemical warfare agents and contaminated military waste},
  howpublished = {Internet: http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html
	(accessed 06-09-2009)},
  owner = {usti},
  url = {http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html}
}

@MASTERSTHESIS{Gerb03,
  author = {M. Gerbracht},
  title = {{Trocknung dicker Photoresistschichten mittels unterschiedlicher
	Trocknungsverfahren}},
  school = {Fachhochschule Düsseldorf},
  year = {2003},
  type = {Diplomarbeit},
  file = {:Photolacke\\Resiste_Diplomarbeit_Gerbracht.pdf:PDF}
}

@INPROCEEDINGS{Golub02-2,
  author = {Yu.B. Golubovskii and V.A. Maiorov v J. Behnke and J.F. Behnke},
  title = {Stability of the barrier discharge relative to the filamentation},
  booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
	Vol. 1, p. 235-236},
  year = {2002},
  file = {Golubovskii02-Filament-stability.pdf:DBD\\Golubovskii02-Filament-stability.pdf:PDF},
  url = {http://optics.phys.spbu.ru/~golub/articles/barrier2d\_16ESCAMPIG.pdf}
}

@ARTICLE{Golub03,
  author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
  title = {Modelling of the homogeneous barrier discharge in helium at atmospheric
	pressure},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2003},
  volume = {36},
  pages = {39\,-\,49},
  doi = {10.1088/0022-3727/36/1/306},
  file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0022-3727/36/1/306}
}

@INPROCEEDINGS{Golub01,
  author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
  title = {The role of emission from the dielectric surface in a homogeneous
	barrier discharge in nitrogen},
  booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13
	July 2001) vol VIII p 3239-3244},
  year = {2001},
  file = {DBD_EmissionenausDielektrikum_Golubovskii01.pdf:DBD\\DBD_EmissionenausDielektrikum_Golubovskii01.pdf:PDF},
  url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_ISPC15.pdf}
}

@MISC{Filament,
  author = {Yu. B. Golubovskii},
  howpublished = {Internet:\newline http://optics.phys.spbu.ru/\textasciitilde{}golub/images/filament.jpg
	(accessed 07-09-2009)},
  owner = {usti},
  url = {http://optics.phys.spbu.ru/~golub/images/filament.jpg}
}

@INPROCEEDINGS{Golub02,
  author = {Yu. B. Golubovskii and V. A. Maiorov and J. Behnke and J. F. Behnke},
  title = {Some Aspects of the Modeling of an Uniform Barrier Discharge in Nitrogen},
  booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
	Vol. 1, p. 233-234},
  year = {2002},
  file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF},
  url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_N2\_16ESCAMPIG.pdf}
}

@MISC{GolubWeb,
  author = {Yu. B. Golubovskii and others},
  title = {Homogeneous barrier discharge},
  howpublished = {Internet: http://optics.phys.spbu.ru/\textasciitilde{}golub/english/barrier.html},
  url = {http://optics.phys.spbu.ru/~golub/english/barrier.html}
}

@ARTICLE{Goos1998,
  author = {A. Goossens and E.L. Maloney and J Schoonman},
  title = {Gas-Phase Synthesis of Nanostructured Anatase $\mathrm{TiO_2}$},
  journal = {Chemical Vapor Deposition},
  year = {1998},
  volume = {4},
  pages = {109\,-\,114},
  number = {3},
  doi = {10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U},
  file = {:DBD\\Goossens-TiCl4-1998.pdf:PDF},
  publisher = {WILEY-VCH Verlag GmbH Weinheim},
  url = {\href{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}}
}

@ARTICLE{Graz08,
  author = {I. Graz and A. Ebner and S. Bauer and C. Romanin and H. Gruber},
  title = {Micropatterned atmospheric pressure discharge surface modification
	of fluorinated polymer films for mammalian cell adhesion and protein
	binding},
  journal = {Appl. Phys. A},
  year = {2008},
  volume = {92},
  pages = {547\,-\,555},
  doi = {10.1007/s00339-008-4614-z},
  file = {:DBD\\Graz-Patterned surface treatment-2008.pdf:PDF},
  url = {http://dx.doi.org/10.1007/s00339-008-4614-z}
}

@ARTICLE{Han04,
  author = {M. Han and W. Lee and S.-K. Lee and S.S. Lee},
  title = {{3D microfabrication with inclined/rotated UV lithography}},
  journal = {Sensors and Actuators A},
  year = {2003},
  volume = {111},
  pages = {14\,-\,20},
  doi = {10.1016/j.sna.2003.10.006},
  file = {Rotated UV.pdf:Photolacke\\Rotated UV.pdf:PDF},
  url = {http://dx.doi.org/10.1016/j.sna.2003.10.006}
}

@ARTICLE{Hand00,
  author = {K. Handique and D.T. Burke and C.H. Mastrangelo and M.A. Burns},
  title = {{Nanoliter liquid metering in microchannels using hydrophobic patterns}},
  journal = {Anal. Chem.},
  year = {2000},
  volume = {72},
  pages = {4100\,-\,4109},
  number = {17},
  doi = {10.1021/ac000064s},
  file = {:Allgemein\\Handique-hydrophobic-channels-2000.pdf:PDF},
  url = {http://dx.doi.org/10.1021/ac000064s}
}

@ARTICLE{Hei04,
  author = {M. Heise and W. Neff and O. Franken and P. Muranyi and J. Wunderlich},
  title = {Sterilization of Polymer Foils with Dielectric Barrier Discharges
	at Atmospheric Pressure},
  journal = {Plasmas polym.},
  year = {2004},
  volume = {9},
  pages = {23\,-\,33},
  doi = {10.1023/B:PAPO.0000039814.70172.c0},
  file = {DBD_Sterilisation_Heise2004.pdf:DBD\\DBD_Sterilisation_Heise2004.pdf:PDF},
  url = {http://dx.doi.org/10.1023/B:PAPO.0000039814.70172.c0}
}

@ARTICLE{Hens07,
  author = {K. Hensel and others},
  title = {Electrical and Optical Properties of {AC} Microdischarges in Porous
	Ceramics},
  journal = {Plasma Process. Polym.},
  year = {2007},
  volume = {4},
  pages = {682\,-\,693},
  doi = {10.1002/ppap.200700022},
  file = {:DBD\\Hensel-DBD-in-Ceramics-2007.pdf:PDF},
  publisher = {WILEY-VCH Verlag Weinheim},
  url = {http://dx.doi.org/10.1002/ppap.200700022}
}

@ARTICLE{Heul04,
  author = {M. Heule and U.P. Schönholzer and L.J. Gauckler},
  title = {Patterning colloidal suspensions by selective wetting of microcontact-printed
	surfaces},
  journal = {J. Eur. Ceram. Soc.},
  year = {2003},
  volume = {24},
  pages = {2733\,-\,2739},
  doi = {10.1016/j.jeurceramsoc.2003.09.011},
  file = {:DBD\\Heule2004.pdf:PDF},
  url = {http://dx.doi.org/10.1016/j.jeurceramsoc.2003.09.011}
}

@ARTICLE{Heusch1998,
  author = {M.O. Heuschkel and L. Guérin and B. Buisson and D. Bertrand and P.
	Renaud},
  title = {Buried microchannels in photopolymer for delivering of solutions
	to neurons in a network},
  journal = {Sensors and Actuators B},
  year = {1998},
  volume = {48},
  pages = {356\,-\,361},
  doi = {10.1016/S0925-4005(98)00071-9},
  file = {buried microchannels in photopolymer.pdf:Photolacke\\buried microchannels in photopolymer.pdf:PDF},
  url = {\href{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}}
}

@ARTICLE{Ho04,
  author = {K.H. Ho and S.T. Newman and S. Rahimifard and R.D. Allen},
  title = {State of the art in wire electrical discharge machining {(WEDM)}},
  journal = {Int. J. Mach. Tool. Manufact.},
  year = {2004},
  volume = {44},
  pages = {1247\,-\,1259},
  number = {12\,-\,13},
  doi = {10.1016/j.ijmachtools.2004.04.017},
  publisher = {Elsevier},
  url = {http://dx.doi.org/10.1016/j.ijmachtools.2004.04.017}
}

@ARTICLE{Inag1998,
  author = {N. Inagaki and S. Tasaka and M. Makino},
  title = {Plasma polymer deposition from mixture of tetramethoxysilane and
	oxygen on {PET} films and their oxygen gas barrier properties},
  journal = {J. Appl. Polym. Sci.},
  year = {1998},
  volume = {64},
  pages = {1031\,-\,1039},
  number = {6},
  doi = {10.1002/%28SICI%291097-4628%2819970509%2964%3A6%3C1031%3A%3AAID-APP1%3E3.0.CO%3B2-M},
  file = {:DBD\\Inagaki-SiOx-oxygen-barrier-1996.pdf:PDF},
  url = {http://dx.doi.org/10.1002/\%28SICI\%291097-4628\%2819970509\%2964\%3A6\%3C1031\%3A\%3AAID-APP1\%3E3.0.CO\%3B2-M}
}

@ARTICLE{Ito07,
  author = {T. Ito and others},
  title = {Characterization of a microfluidic device fabricated using a photosensitive
	sheet},
  journal = {J. Micromech. Microeng.},
  year = {2007},
  volume = {17},
  pages = {432\,-\,438},
  doi = {10.1088/0960-1317/17/3/003},
  file = {Ito07.pdf:Photolacke\\Ito07.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/17/3/003}
}

@ARTICLE{Jack01,
  author = {R.J. Jackman and T.M. Floyd and R. Ghodssi and M.A. Schmidt and K.F.
	Jensen},
  title = {Microfluidic systems with on-line UV detection fabricated in photodefinable
	epoxy},
  journal = {J. Micromech. Microeng.},
  year = {2001},
  volume = {11},
  pages = {1\,-\,8},
  doi = {10.1088/0960-1317/11/3/316},
  file = {Jack01.pdf:Photolacke\\Jack01.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/11/3/316}
}

@ARTICLE{Jens03,
  author = {K.L. Jensen},
  title = {Electron emission theory and its application: Fowler--Nordheim equation
	and beyond},
  journal = {J. Vac. Sci. Technol. B},
  year = {2003},
  volume = {21(4)},
  pages = {1528\,-\,1544},
  doi = {10.1116/1.1573664},
  file = {:DBD\\2003_Electron emission theory and its application.pdf:PDF},
  url = {http://dx.doi.org/10.1116/1.1573664}
}

@ARTICLE{Jens02,
  author = {K.L. Jensen},
  title = {Theory of Field Emission},
  journal = {Vacuum Microelectronics},
  year = {2002},
  volume = {Chapter 3},
  pages = {33\,-\,104},
  doi = {10.1002/0471224332.ch3},
  url = {http://dx.doi.org/10.1002/0471224332.ch3}
}

@ARTICLE{Jide06,
  author = {N. Jidenko and M. Petit and J.P. Borra},
  title = {Electrical characterization of microdischarges produced by dielectric
	barrier discharge in dry air at atmospheric pressure},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2006},
  volume = {39},
  pages = {281\,-\,293},
  number = {2},
  doi = {10.1088/0022-3727/39/2/008},
  file = {:DBD\\Jidenko-Plasma-Control-2006.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0022-3727/39/2/008}
}

@ARTICLE{Jigu06,
  author = {S. Jigueta and M. Judelewicza and S. Mischlerb and A. Bertchc and
	P. Renaudc},
  title = {Effect of filler behavior on nanocomposite {SU8} photoresist for
	moving micro-parts},
  journal = {Microelectron. Eng.},
  year = {2006},
  volume = {83},
  pages = {1273\,-\,1276},
  doi = {10.1016/j.mee.2006.01.068},
  file = {Jiguet_SU-8_filler.pdf:Photolacke\\Jiguet_SU-8_filler.pdf:PDF},
  url = {http://dx.doi.org/10.1016/j.mee.2006.01.068}
}

@ARTICLE{Kang03,
  author = {W.S. Kang and J.M. Park and Y. Kim and S.H. Hong},
  title = {Numerical study on influences of barrier arrangements on dielectric
	barrier discharge characteristics},
  journal = {IEEE Trans. Plasma Sci.},
  year = {2003},
  volume = {31},
  pages = {504\,-\,510},
  number = {4},
  doi = {10.1109/TPS.2003.815469},
  file = {:DBD\\Kang-StreamerSimulations-2003.pdf:PDF},
  url = {http://dx.doi.org/10.1109/TPS.2003.815469}
}

@ARTICLE{Kawa1969,
  author = {H. Kawauchi and K. Tuzimura and H. Maeda and N. Ishida},
  title = {Reaction of fluorescein-isothiocyanate with proteins and amino acids:
	{II.} Preparation of FIuorescein-Thiohydantoin Amino Acids and Their
	Thin-layer Chromatography},
  journal = {Journal of Biochemistry},
  year = {1969},
  volume = {66},
  pages = {783\,-\,789},
  number = {6},
  file = {:Allgemein\\Kawauchi-FITC-reaction-1969.pdf:PDF},
  publisher = {Jpn Biochemical Soc},
  url = {http://jb.oxfordjournals.org/cgi/content/abstract/66/6/783}
}

@INPROCEEDINGS{Kien04,
  author = {J. Kieninger and G. Jobst and G. Igel and I. Moser and G. Urban},
  title = {{3D} Polymer Microstructures by Laminating {SU-8} Films},
  booktitle = {{Proceedings of \textmu TAS 2004}},
  year = {2004},
  volume = {2},
  pages = {363\,-\,365},
  file = {:Photolacke\\Kieninger-Manuscript_microTAS04_SU.-8pdf.pdf:PDF}
}

@ARTICLE{Kim04,
  author = {K. Kim and others},
  title = {{A tapered hollow metallic microneedle array using backside exposure
	of SU-8}},
  journal = {J. Micromech. Microeng.},
  year = {2004},
  volume = {14},
  pages = {597\,-\,603},
  doi = {10.1088/0960-1317/14/4/021},
  file = {Hollow Needles.pdf:Photolacke\\Hollow Needles.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/14/4/021}
}

@ARTICLE{Kim03,
  author = {S.-O. Kim and J.G. Eden},
  title = {Arrays of Microplasma Devices Fabricated in Photodefinable Glass
	and Excited {AC or DC} by Interdigitated Electrodes},
  journal = {IEEE Photonics Technology Letters},
  year = {2005},
  volume = {17},
  pages = {1543\,-\,1545},
  doi = {10.1109/LPT.2005.848260},
  file = {:DBD\\Kim-Cavity Array Foturan-2005.pdf:PDF},
  url = {http://dx.doi.org/10.1109/LPT.2005.848260}
}

@INPROCEEDINGS{Kim08,
  author = {Y.K. Kim and D. J. Kim},
  title = {Deposition of super hydrophobic {a-C:F} films by dielectric barrier
	discharge at atmospheric pressure},
  booktitle = {Book of Abstract of 11th International Conference on Plasma Surface
	Engineering PSE 2008},
  year = {2008},
  file = {:DBD\\Kim-CxFy-surface-DBD-2008.pdf:PDF},
  url = {http://www.pse2008.net/pdf\_edit/tmp/PO1063-PSE2008-2f1418.pdf}
}

@ARTICLE{Klag07-2,
  author = {C.P. Klages and C. Berger and M. Eichler and M. Thomas},
  title = {Microplasma-Based Treatment of Inner Surfaces in Microfluidic Devices},
  journal = {Contributions to Plasma Physics},
  year = {2007},
  volume = {47},
  pages = {49\,-\,56},
  doi = {10.1002/ctpp.200710008},
  file = {:DBD\\Klages-plasmaprinting-channels-2007.pdf:PDF},
  publisher = {WILEY-VCH Verlag Berlin},
  url = {http://dx.doi.org/10.1002/ctpp.200710008}
}

@ARTICLE{Klag00,
  author = {C.P. Klages and K. Höpfner and N. Kläke and R. Thyen},
  title = {Surface functionalization at atmospheric pressure by {DBD}-based
	pulsed plasma polymerization},
  journal = {Plasmas and Polymers},
  year = {2000},
  volume = {5},
  pages = {79\,-\,89},
  number = {2},
  doi = {10.1023/A:1009583815474},
  file = {:DBD\\Klages-Epoxy-groups-2000.pdf:PDF},
  publisher = {Springer},
  url = {\newline http://dx.doi.org/10.1023/A:1009583815474}
}

@ARTICLE{Klag07,
  author = {C.P. Klages and others},
  title = {Surface Technology with Cold Microplasmas},
  journal = {Plasma Process. Polym.},
  year = {2007},
  volume = {4},
  pages = {208\,-\,218},
  number = {3},
  doi = {10.1002/ppap.200600116},
  file = {:DBD\\Klages-Overview-07.pdf:PDF},
  publisher = {John Wiley \& Sons, Ltd},
  url = {\newline http://dx.doi.org/10.1002/ppap.200600116}
}

@ARTICLE{Kogel03,
  author = {U. Kogelschatz},
  title = {Dielectric-barrier Discharges: Their History, Discharge Physics,
	and Industrial Applications},
  journal = {Plasma Chem. Plasma Process.},
  year = {2003},
  volume = {23},
  pages = {1\,-\,46},
  doi = {10.1023/A:1022470901385},
  file = {kogelschatz.pdf:DBD\\kogelschatz.pdf:PDF},
  url = {http://dx.doi.org/10.1023/A:1022470901385}
}

@ARTICLE{Kogel02,
  author = {U. Kogelschatz},
  title = {Filamentary, Patterned, and Diffuse Barrier Discharges},
  journal = {IEEE Trans. Plasma Sci.},
  year = {2002},
  volume = {30},
  pages = {1400\,-\,1408},
  number = {4},
  doi = {10.1109/TPS.2002.804201},
  file = {:DBD\\Kogelschatz-Filaments-2002.pdf:PDF},
  url = {http://dx.doi.org/10.1109/TPS.2002.804201}
}

@ARTICLE{Koid07,
  author = {T. Koida and H. Fujiwara and M. Kondo},
  title = {Hydrogen-doped $\mathrm{In_{2}O_{3}}$ as High-mobility Transparent
	Conductive Oxide},
  journal = {Jpn. J. Appl. Phys.},
  year = {2007},
  volume = {46},
  pages = {L685\,-\,L687},
  number = {28},
  doi = {10.1143/JJAP.46.L685},
  file = {:Allgemein\\Koida-ITO-2007.pdf:PDF},
  url = {http://dx.doi.org/10.1143/JJAP.46.L685}
}

@ARTICLE{Kozl05,
  author = {K.V. Kozlov and others},
  title = {Barrier discharges in {N2/O}2 mixtures},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2005},
  volume = {38},
  pages = {518\,-\,529},
  doi = {10.1088/0022-3727/38/4/003},
  file = {:DBD\\Kozlov-oxygen-impurity-2005.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0022-3727/38/4/003}
}

@ARTICLE{Krei05,
  author = {S. Kreitz and C. Penache and M. Thomas and C.-P. Klages},
  title = {Patterned {DBD} treatment for area-selective metallization of polymers-plasma
	printing},
  journal = {Surf. Coat. Technol.},
  year = {2005},
  volume = {200},
  pages = {676\,-\,679},
  doi = {10.1016/j.surfcoat.2005.01.085},
  file = {:DBD\\Kreitz05-Patterned DBD treatment.pdf:PDF},
  url = {http://dx.doi.org/10.1016/j.surfcoat.2005.01.085}
}

@ARTICLE{Kukh03,
  author = {E. Kukharenka and M.M. Farooqui and L. Grigore and M. Kraft and N.
	Hollinshead},
  title = {Electroplating moulds using dry film thick negative photoresist.},
  journal = {J. Micromech. Microeng.},
  year = {2003},
  volume = {13},
  pages = {S67\,-\,S74},
  doi = {10.1088/0960-1317/13/4/311},
  file = {Ordyl-1.pdf:Photolacke\\Ordyl-1.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/13/4/311}
}

@ARTICLE{Kunh00,
  author = {E.E. Kunhardt},
  title = {Generation of Large-Volume, Atmospheric-Pressure, Nonequilibrium
	Plasmas},
  journal = {IEEE Trans. Plasma Sci.},
  year = {2000},
  volume = {28},
  pages = {189\,-\,200},
  doi = {10.1109/27.842901},
  file = {:DBD\\Kunhardt00-Frequency-Ignition.pdf:PDF},
  url = {http://dx.doi.org/10.1109/27.842901}
}

@ARTICLE{Kwak03,
  author = {M.G. Kwak and others},
  title = {Improvement of Luminance Efficiency in Xenon Dielectric Barrier Discharge
	Flat Lamp},
  journal = {IEEE Trans. Plasma Sci.},
  year = {2003},
  volume = {31},
  pages = {176\,-\, 178},
  doi = {10.1109/TPS.2003.808867},
  file = {Kwak-Xenon-Lamp-2002.pdf:DBD\\Kwak-Xenon-Lamp-2002.pdf:PDF},
  url = {http://dx.doi.org/10.1109/TPS.2003.808867}
}

@ARTICLE{Lang05,
  author = {B.A. Langowski and K.E. Uhrich},
  title = {Microscale Plasma-Initiated Patterning (\textmu {PIP})},
  journal = {Langmuir},
  year = {2005},
  volume = {21},
  pages = {10509\,-\,10514},
  doi = {10.1021/la052222m},
  file = {:DBD\\Langowski-PDMS plasma patterning-2005.pdf:PDF},
  url = {\newline http://dx.doi.org/10.1021/la052222m}
}

@UNPUBLISHED{Lede08,
  author = {L. Ledernez and F. Olcaytug and G. Urban and H. Yasuda},
  title = {Influence of the Electrode Material on the Electrical Breakdown of
	Argon},
  note = {accepted for Plasma Sources Science and Technology}
}

@ARTICLE{Leve1944,
  author = {K. Levenberg},
  title = {A method for the solution of certain non-linear problems in least
	squares},
  journal = {Q. Appl. Math},
  year = {1944},
  volume = {2},
  pages = {164\,-\,168},
  number = {2}
}

@ARTICLE{Lu08,
  author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden},
  title = {Low temperature plasma channels generated in microcavity trenches
	with widths of 20\,-\,150\,\textmu{}m and aspect ratios as large
	as 10\textsuperscript{4}\,:\,1},
  journal = {Appl. Phys. Lett.},
  year = {2008},
  volume = {92},
  pages = {1397\,-\,1402},
  doi = {10.1063/1.2827197},
  file = {:DBD\\Lu-Plasma channels-2008.pdf:PDF},
  url = {http://dx.doi.org/10.1063/1.2827197}
}

@ARTICLE{Lu07,
  author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden},
  title = {Microcavity Plasma Devices and Arrays Fabricated by Plastic-Based
	Replica Molding},
  journal = {J. Microelectromech. Syst.},
  year = {2007},
  volume = {16},
  pages = {1397\,-\,1402},
  doi = {10.1109/JMEMS.2006.886034},
  file = {:DBD\\Lu-Microcavities by molding-2007.pdf:PDF},
  url = {http://dx.doi.org/10.1109/JMEMS.2006.886034}
}

@PHDTHESIS{Luca09,
  author = {N. Lucas},
  title = {Microplasma Stamps - An Atmospheric-Pressure Plasma Source for the
	Area-Selective Modification of Surfaces},
  school = {Institute for Microtechnology, TU Braunschweig},
  year = {2009},
  url = {http://www.shaker.de/Online-Gesamtkatalog/details.asp?ID=8983398&CC=3631&ISBN=3-8322-8008-1}
}

@ARTICLE{Luca08-2,
  author = {N. Lucas and V. Ermel and M. Kurrat and S. Büttgenbach},
  title = {Microplasma stamps for selective surface modification: design and
	characterization},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2008},
  volume = {41},
  pages = {215202 (7pp)},
  doi = {10.1088/0022-3727/41/21/215202},
  file = {:DBD\\Lucas-PDMS-Stamps-2.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0022-3727/41/21/215202}
}

@ARTICLE{Luca08-1,
  author = {N. Lucas and A. Hinze and C.-P. Klages and S. Büttgenbach},
  title = {Design and optimization of dielectric barrier discharge microplasma
	stamps},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2008},
  volume = {41},
  pages = {194012 (5pp)},
  doi = {10.1088/0022-3727/41/19/194012},
  file = {:DBD\\Lucas-PDMS-Stamps-1.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0022-3727/41/19/194012}
}

@ARTICLE{Malk08,
  author = {G.S. Malkov and others},
  title = {Pulsed-Plasma-Induced Micropatterning with Alternating Hydrophilic
	and Hydrophobic Surface Chemistries},
  journal = {Plasma Process. Polym.},
  year = {2008},
  volume = {5},
  pages = {129\,-\,145},
  number = {2},
  doi = {10.1002/ppap.200700118},
  file = {:DBD\\Malkov-SEM mask pattern-2008.pdf:PDF},
  publisher = {John Wiley \& Sons, Ltd},
  url = {http://dx.doi.org/10.1002/ppap.200700118}
}

@ARTICLE{Marq1963,
  author = {Donald W. Marquardt},
  title = {An Algorithm for Least-Squares Estimation of Nonlinear Parameters},
  journal = {SIAM Journal on Applied Mathematics},
  year = {1963},
  volume = {11},
  pages = {431\,-\,441},
  number = {2},
  doi = {10.1137/0111030},
  publisher = {SIAM},
  url = {http://dx.doi.org/10.1137\%2F0111030}
}

@ARTICLE{Mart04,
  author = {C.R. Martin and I.A. Aksay},
  title = {Submicrometer-scale patterning of ceramic thin films},
  journal = {J. of Electroceramics},
  year = {2004},
  volume = {12},
  pages = {53\,-\,68},
  number = {1},
  doi = {10.1023/B:JECR.0000034001.15359.98},
  file = {:Allgemein\\Martin-Patterning-Ceramics-Overview-2004.pdf:PDF},
  publisher = {Springer},
  url = {http://dx.doi.org/10.1023/B:JECR.0000034001.15359.98}
}

@ARTICLE{Mart1997,
  author = {C. Martinet and V. Paillard and A. Gagnaire and J. Joseph},
  title = {Deposition of $\mathrm{SiO_2}$ and $\mathrm{TiO_2}$ thin films by
	plasma enhanced chemical vapor deposition for antireflection coating},
  journal = {J. Non-Cryst. Solids},
  year = {1997},
  volume = {216},
  pages = {77\,-\,82},
  doi = {10.1016/S0022-3093(97)00175-0},
  file = {:DBD\\Martinet-SiO2-TiO2-1997.pdf:PDF},
  url = {\href{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}}
}

@ARTICLE{Mass01,
  author = {F. Massines and others},
  title = {The role of dielectric barrier discharge atmosphere and physics on
	polypropylene surface treatment},
  journal = {Plasmas and Polymers},
  year = {2001},
  volume = {6},
  pages = {35\,-\,49},
  number = {1},
  doi = {10.1023/A:1011365306501},
  file = {:DBD\\Massines-oxygen-impurities-2001.pdf:PDF},
  url = {http://dx.doi.org/10.1023/A:1011365306501}
}

@ARTICLE{Masu1998,
  author = {T. Masuzawa and T. Takawashi},
  title = {{Recent trends in EDM/ECM technologies in Japan}},
  journal = {VDI BERICHTE},
  year = {1998},
  volume = {1405},
  pages = {1\,-\,16},
  publisher = {VDI VERLAG GMBH}
}

@ARTICLE{Mata06,
  author = {A. Mata and A.J. Fleischmann and S. Roy},
  title = {Fabrication of multi-layer {SU-8} microstructures},
  journal = {J. Micromech. Microeng.},
  year = {2006},
  volume = {16},
  pages = {276\,-\,284},
  doi = {10.1088/0960-1317/16/2/012},
  file = {SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/16/2/012}
}

@ARTICLE{Melz1996,
  author = {K.A. Melzak and C.S. Sherwood and R.F.B. Turner and C.A. Haynes},
  title = {Driving forces for {DNA} adsorption to silica in perchlorate solutions},
  journal = {J. Colloid Interface Sci.},
  year = {1996},
  volume = {181},
  pages = {635\,-\,644},
  number = {2},
  doi = {10.1006/jcis.1996.0421},
  file = {:Allgemein\\Melzak-DNA-SiOx-Adsorption-1996.pdf:PDF},
  publisher = {Elsevier},
  url = {\newline http://dx.doi.org/10.1006/jcis.1996.0421}
}

@CONFERENCE{Menz02,
  author = {W. Menz and R. Förster and A. Schoth and C. Müller},
  title = {Non-conventional machining for microsystems},
  booktitle = {Proc. 3rd Euspen Int. Conf.},
  year = {2002},
  pages = {37}
}

@ARTICLE{Mira00,
  author = {S.F. Miralaï and others},
  title = {Electrical and Optical Diagnostics of Dielectric Barrier Discharges
	{(DBD) in He and N2} for Polymer Treatment},
  journal = {Plasmas and Polymers},
  year = {2000},
  volume = {5},
  pages = {63\,-\,77},
  number = {2},
  doi = {10.1023/A:1009531831404},
  file = {:DBD\\Miralai-oxygen-impurity-2000.pdf:PDF},
  url = {http://dx.doi.org/10.1023/A:1009531831404}
}

@INPROCEEDINGS{TOK06,
  author = {K. Misumi and others},
  title = {Faster sensitivity and non-antimonite permanent photoresist for {MEMS}},
  booktitle = {Advances in Resist Technology and Processing XXIII},
  year = {2006},
  editor = {Qinghuang Lin},
  volume = {6153},
  series = {Proceedings of SPIE},
  pages = {61534F},
  organization = {SPIE},
  doi = {10.1117/12.656249},
  file = {TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:Photolacke\\TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:PDF},
  url = {http://dx.doi.org/10.1117/12.656249}
}

@ARTICLE{TOK06-2,
  author = {K. Misumi and K. Saito and A. Yamanouchi and T. Senzaki and H. Honma},
  title = {Minute Tunnel Structure Formation with Permanent Film Photoresist},
  journal = {J. Photopolym. Sci. Technol.},
  year = {2006},
  volume = {19},
  pages = {57\,-\,62},
  doi = {10.2494/photopolymer.19.57},
  file = {TOK-Minute tunnel structure formation with permanent film photoresist.pdf:Photolacke\\TOK-Minute tunnel structure formation with permanent film photoresist.pdf:PDF},
  url = {\newline http://dx.doi.org/10.2494/photopolymer.19.57}
}

@ARTICLE{Mull1988,
  author = {W.M. Mullins and B.L. Averbach},
  title = {Surface properties of silicon and aluminum oxide powders},
  journal = {Surface Science},
  year = {1988},
  volume = {206},
  pages = {41\,-\,51},
  number = {1-2},
  doi = {10.1016/0039-6028(88)90013-1},
  file = {:DBD\\Mullins-Work function of AluOxide-1988.pdf:PDF},
  publisher = {Elsevier},
  url = {\href{http://dx.doi.org/10.1016/0039-6028(88)90013-1}{http://dx.doi.org/10.1016/0039-6028(88)90013-1}}
}

@ARTICLE{Murp1956,
  author = {E.L. Murphy and R.H. {Good, Jr.}},
  title = {Thermionic Emission, Field Emission, and the Transition Region},
  journal = {Phys. Rev.},
  year = {1956},
  volume = {102},
  pages = {1464 - 1473},
  doi = {10.1103/PhysRev.102.1464},
  file = {:DBD\\Murphy,Good - Thermionic Emission, Field Emission, and the Transition Region.pdf:PDF},
  url = {http://dx.doi.org/10.1103/PhysRev.102.1464}
}

@ARTICLE{Muel1999,
  author = {I. Müller and C. Punset and E. Ammelt and H.-G. Purwins and J.P.
	Boeuf},
  title = {Self-Organized Filaments in Dielectric Barrier Glow Discharges},
  journal = {IEEE Trans. Plasma Sci.},
  year = {1999},
  volume = {27},
  pages = {20\,-\,21},
  doi = {10.1109/27.763004},
  file = {Müller-Filaments-glow-discharge-1999.pdf:DBD\\Müller-Filaments-glow-discharge-1999.pdf:PDF},
  url = {http://dx.doi.org/10.1109/27.763004}
}

@ARTICLE{Naka01,
  author = {A. Nakajima and K. Hashimoto and T. Watanabe},
  title = {Recent studies on super-hydrophobic films},
  journal = {Monatshefte für Chemie\,/\,Chemical Monthly},
  year = {2001},
  volume = {132},
  pages = {31\,-\,41},
  doi = {10.1007/s007060170142},
  file = {:Allgemein\\TiO2-hydrophobic-Nakajima-2001.pdf:PDF},
  publisher = {Springer},
  url = {http://dx.doi.org/10.1007/s007060170142}
}

@ARTICLE{Niem1995,
  author = {L. Niemeyer},
  title = {A generalized approach to partial discharge modeling},
  journal = {IEEE Transactions on Dielectrics and Electrical Insulation},
  year = {1995},
  volume = {2},
  pages = {510\,-\,528},
  number = {4},
  doi = {10.1109/94.407017},
  file = {:DBD\\Niemeyer 95 generalized approach partial discharges.pdf:PDF},
  url = {http://dx.doi.org/10.1109/94.407017}
}

@ARTICLE{Noes04,
  author = {M. Noeske and J. Degenhardt and S. Strudthoff and U. Lommatzsch},
  title = {Plasma jet treatment of five polymers at atmospheric pressure: surface
	modifications and the relevance for adhesion},
  journal = {International Journal of Adhesion \& Adhesives},
  year = {2004},
  volume = {24},
  pages = {171\,-\,177},
  doi = {10.1016/j.ijadhadh.2003.09.006},
  file = {:DBD\\Noeske03-plasma jet treatment.pdf:PDF},
  url = {http://dx.doi.org/10.1016/j.ijadhadh.2003.09.006}
}

@ARTICLE{Nord1928,
  author = {L. Nordheim},
  title = {Zur Theorie der thermischen Emission und der Reflexion von Elektronen
	an Metallen},
  journal = {Zeitschrift für Physik A Hadrons and Nuclei},
  year = {1928},
  volume = {46},
  pages = {833\,-\,855},
  number = {11\,-\,12},
  month = {November},
  doi = {10.1007/BF01391020},
  file = {:DBD\\Nordheim-1928.pdf:PDF},
  url = {http://dx.doi.org/10.1007/BF01391020}
}

@CONFERENCE{Nuss09,
  author = {D. Nußbaum and D. Herrmann and T. Knoll and T. Velten},
  title = {Micromixing Structures for Lab-on Chip Applications: Fabrication
	and Simulation of 90° Zigzag Microchann els in Dry Film Resist},
  booktitle = {4M\,/\,ICOMM 2009 Conference},
  year = {2009},
  pages = {215\,-\,218},
  doi = {10.1243/17547164C0012009041},
  file = {:Photolacke\\Nußbaum-PerMX-2009.pdf:PDF},
  owner = {usti},
  url = {http://dx.doi.org/10.1243/17547164C0012009041}
}

@ARTICLE{Obri01,
  author = {J. O'Brien},
  title = {Advanced photoresist technologies for microsystems},
  journal = {J. Micromech. Microeng.},
  year = {2001},
  volume = {11},
  pages = {353\,-\,358},
  doi = {10.1088/0960-1317/11/4/312},
  file = {OBrien01.pdf:Photolacke\\OBrien01.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/11/4/312}
}

@ARTICLE{Ohl1999,
  author = {A. Ohl and K. Schröder},
  title = {Plasma-induced chemical micropatterning for cell culturing applications:
	a brief review},
  journal = {Surf. Coat. Technol.},
  year = {1999},
  volume = {116},
  pages = {820\,-\,830},
  doi = {10.1016/S0257-8972(99)00150-4},
  file = {:DBD\\Ohl-SEM grid pattern-1999.pdf:PDF},
  publisher = {Elsevier},
  url = {\href{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}}
}

@PHDTHESIS{Olss1998,
  author = {Anders Olsson},
  title = {Valve-less Diffuser Micropumps},
  school = {School of Electrical Engineering, Royal Institute of Technology,
	Stockholm, Sweden},
  year = {1998},
  file = {:Allgemein\\1998 Valve-less diffuser micropumps.pdf:PDF},
  url = {http://www.s3.kth.se/instrlab/research/dissertations/pdf/andersodoc.pdf}
}

@ARTICLE{Pan02,
  author = {C.-T. Pan and H. Yang and S.-C. Shen and M.-C. Chou and H.-P. Chou},
  title = {A low-temperature wafer bonding technique using patternable materials},
  journal = {J. Micromech. Microeng.},
  year = {2002},
  volume = {12},
  pages = {611\,-\,615},
  doi = {10.1088/0960-1317/12/5/315},
  file = {Wafer-Bonding-Pan.pdf:Photolacke\\Wafer-Bonding-Pan.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/12/5/315}
}

@ARTICLE{Park01,
  author = {J. Park and I. Henins and H.W. Herrmann and G.S. Selwyn},
  title = {Discharge phenomena of an atmospheric pressure radio-frequency capacitive
	plasma source},
  journal = {J. Appl. Phys.},
  year = {2001},
  volume = {89},
  pages = {20\,-\,28},
  doi = {10.1063/1.1323753},
  file = {:DBD\\Park01-Discharge phenomena.pdf:PDF},
  url = {http://dx.doi.org/10.1063/1.1323753}
}

@ARTICLE{Park05,
  author = {S.-J. Park and K.S. Kim and J.G. Eden},
  title = {Nanoporous alumina as a dielectric for microcavity plasma devices:
	Multilayer {Al/AlO} structures},
  journal = {Appl. Phys. Lett.},
  year = {2005},
  volume = {86},
  pages = {221501},
  doi = {10.1063/1.1923747},
  file = {:DBD\\Park-Cavitiy Al2O3-2005.pdf:PDF},
  publisher = {AIP},
  url = {http://dx.doi.org/10.1063/1.1923747}
}

@ARTICLE{Pasc1889,
  author = {F. Paschen},
  title = {{Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure
	bei verschiedenen Drucken erforderliche Potentialdifferenz}},
  journal = {Annalen der Physik},
  year = {1889},
  volume = {273},
  pages = {69\,-\,96},
  number = {5},
  doi = {10.1002/andp.18892730505},
  file = {:DBD\\Paschen-1889.pdf:PDF},
  url = {http://dx.doi.org/10.1002/andp.18892730505}
}

@ARTICLE{Payn02,
  author = {W.G. Payne and B.W. James and I.S. Falconer},
  title = {The Growth and Decay of Miniature Dielectric Barrier Discharges in
	Helium, Neon, and Argon},
  journal = {IEEE Trans. Plasma Sci.},
  year = {2002},
  volume = {30},
  pages = {170\,-\,171},
  doi = {10.1109/TPS.2002.1003978},
  file = {Payne-Discharge-Growth-2002.pdf:DBD\\Payne-Discharge-Growth-2002.pdf:PDF},
  url = {http://dx.doi.org/10.1109/TPS.2002.1003978}
}

@MISC{PCI,
  author = {{PCI-SIG}},
  title = {{PCI} Conventional specifications},
  howpublished = {Internet:\newline http://www.pcisig.com/specifications/conventional
	(accessed 08-01-2010)},
  url = {http://www.pcisig.com/specifications/conventional}
}

@ARTICLE{Pena04,
  author = {C. Penache and C. Gessner and T. Betker and V. Bartels and C.-P.
	Klages},
  title = {Plasma printing: patterned surface functionalisation and coating
	at atmospheric pressure},
  journal = {IEE Proc.-Nanobiotechnol.},
  year = {2004},
  volume = {151},
  pages = {139\,-\,144},
  booktitle = {Proceedings. 2nd VDE World Microtechnologies Congress, October 13
	- 15, 2003},
  doi = {10.1049/ip-nbt:20040836},
  file = {:DBD\\Penache04-Printing.pdf:PDF},
  url = {http://dx.doi.org/10.1049/ip-nbt:20040836}
}

@ARTICLE{Phel1999,
  author = {A.V. Phelps and Z.Lj. Petrovic},
  title = {Cold-cathode discharges and breakdown in argon: surface and gas phase
	production of secondary electrons},
  journal = {Plasma Sources Sci. Technol.},
  year = {1999},
  volume = {8},
  pages = {21\,-\,44},
  doi = {10.1088/0963-0252/8/3/201},
  file = {:DBD\\Phelps-Petrovic-Secondary-emission-1999.pdf:PDF},
  publisher = {IOP PUBLISHING},
  url = {http://dx.doi.org/10.1088/0963-0252/8/3/201}
}

@INPROCEEDINGS{Rada07,
  author = {A.D. Radadia and L. Cao and H.-K. Jeong and M.A. Shannon and R.I.
	Masel},
  title = {A {3D} Micromoxer Fabricated with Dry Film Resist},
  booktitle = {Proc. of MEMS 2007},
  year = {2007},
  pages = {361\,-\,364},
  doi = {10.1109/MEMSYS.2007.4433110},
  file = {:Photolacke\\Radadia-3D micromixer-2007.pdf:PDF},
  url = {http://dx.doi.org/10.1109/MEMSYS.2007.4433110}
}

@ARTICLE{Radm07,
  author = {M. Radmilovic-Radjenovic and Z.L. Petrovic and B. Radjenovic},
  title = {Modelling of breakdown behavior by {PIC/MCC} code with improved secondary
	emission models},
  journal = {J. Phys.: Conf. Ser.},
  year = {2007},
  volume = {71},
  pages = {012007},
  number = {1},
  booktitle = {Journal of Physics: Conference Series},
  doi = {10.1088/1742-6596/71/1/012007},
  file = {:DBD\\Radjenovic-secondary-emisson-2007.pdf:PDF},
  url = {http://dx.doi.org/10.1088/1742-6596/71/1/012007}
}

@ARTICLE{Radu03,
  author = {I. Radu and R. Bartnikas and G. Czeremuszkin and M.R. Wertheimer},
  title = {Diagnostics of Dielectric Barrier Discharges in Noble Gases: Atmospheric
	Pressure Glow and Pseudoglow Discharges and Spatio-Temporal Patterns},
  journal = {IEEE Trans. Plasma Sci.},
  year = {2003},
  volume = {31},
  pages = {411\,-\,421},
  number = {3},
  doi = {10.1109/TPS.2003.811647},
  file = {:DBD\\Radu-filament-noble-gases-2003.pdf:PDF},
  url = {http://dx.doi.org/10.1109/TPS.2003.811647}
}

@ARTICLE{Radu05,
  author = {I. Radu and R. Bartnikas and M.R. Wertheimer},
  title = {Diagnostics and modelling of noble gas atmospheric pressure dielectric
	barrier discharges in homogeneous or diverging electric fields},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2005},
  volume = {38},
  pages = {539\,-\,546},
  doi = {10.1088/0022-3727/38/4/005},
  file = {Radu-filament-noble-gases-2005.pdf:DBD\\Radu-filament-noble-gases-2005.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0022-3727/38/4/005}
}

@ARTICLE{Rao05,
  author = {R.B. Rao and K.L. Krafcik and A.M. Morales and J. Lewis},
  title = {Microfabricated deposition nozzles for direct-write assembly of three-dimensional
	periodic structures},
  journal = {Adv. Mater.},
  year = {2005},
  volume = {17},
  pages = {289\,-\,293},
  number = {3},
  doi = {10.1002/adma.200400514},
  file = {:Allgemein\\Rao-3D-ink-hexagonal-2005.pdf:PDF},
  publisher = {Wiley-VCH Verlag GmbH},
  url = {http://dx.doi.org/10.1002/adma.200400514}
}

@BOOK{Rich1921,
  title = {The Emission of Electricity from Hot Bodies},
  publisher = {Longmans, Green and co.},
  year = {1921},
  author = {O.W. Richardson},
  url = {http://www.worldcat.org/wcpa/oclc/946804}
}

@ARTICLE{Sarr06,
  author = {C. Sarra-Bournet and S. Turgeon and D. Mantovani and G. Laroche},
  title = {A study of atmospheric pressure plasma discharges for surface functionalization
	of {PTFE} used in biomedical applications},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2006},
  volume = {39},
  pages = {3461\,-\,3469},
  number = {16},
  doi = {10.1088/0022-3727/39/16/S03},
  file = {:DBD\\Sarra-Bournet-treatment-time-2006.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0022-3727/39/16/S03}
}

@ARTICLE{Sawa1995,
  author = {Y. Sawada and S. Ogawa and M. Kogoma},
  title = {Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane
	films prepared by atmospheric pressure glow discharge},
  journal = {J. Phys. D: Appl. Phys.},
  year = {1995},
  volume = {28},
  pages = {1661\,-\,1661},
  doi = {10.1088/0022-3727/28/8/015},
  file = {:DBD\\Sawada-TEOS-SiOx-1995.pdf:PDF},
  publisher = {IOP PUBLISHING LTD},
  url = {http://dx.doi.org/10.1088/0022-3727/28/8/015}
}

@ARTICLE{Sche07,
  author = {A. Schenk and others},
  title = {Microstructured Electrode Arrays: Optical analysis of the Glow Discharge
	in a Magnified Electrode Gap},
  journal = {Plasma Process. Polym.},
  year = {2007},
  volume = {4},
  pages = {S927\,-\,S930},
  doi = {10.1002/ppap.200732301},
  file = {:DBD\\Schenk-Optical-Analysis.pdf:PDF},
  url = {http://dx.doi.org/10.1002/ppap.200732301}
}

@ARTICLE{Scho04,
  author = {K.H. Schoenbach and M. Moselhy and W. Shi},
  title = {Self-organization in cathode boundary layer microdischarges},
  journal = {Plasma Sources Sci. Technol.},
  year = {2004},
  volume = {13},
  pages = {177\,-\,185},
  number = {1},
  doi = {10.1088/0963-0252/13/1/023},
  file = {:DBD\\Schoenbach-FilamentDiameter-2004.pdf:PDF},
  publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
	c1991-},
  url = {http://dx.doi.org/10.1088/0963-0252/13/1/023}
}

@ARTICLE{Scho1999,
  author = {U.P Schönholzer and L.J. Gauckler},
  title = {Ceramic parts patterned in the micrometer range},
  journal = {Adv. Mater.},
  year = {1999},
  volume = {11},
  pages = {630\,-\,632},
  number = {8},
  file = {:Allgemein\\Schoenholzer-KeramikStrukturiertSintern1-1999.pdf:PDF},
  publisher = {WILEY-VCH Verlag GmbH Weinheim},
  url = {\href{http://www.cheric.org/research/tech/periodicals/doi.php?art_seq=646499}{http://www.cheric.org/research/tech/periodicals/doi.php?art\_seq=\newline 646499}}
}

@ARTICLE{Smit00,
  author = {R.C. Smith and others},
  title = {Chemical vapour deposition of the oxides of titanium, zirconium and
	hafnium for use as high-k materials in microelectronic devices. A
	carbon-free precursor for the synthesis of hafnium dioxide},
  journal = {Adv. Mater. Opt. and Electron.},
  year = {2000},
  volume = {10},
  pages = {105\,-\,114},
  number = {3-5},
  doi = {10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J},
  file = {:DBD\\Smith-Ti-and-others-2000.pdf:PDF},
  publisher = {John Wiley \& Sons, Ltd. Chichester, UK},
  url = {\href{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}}
}

@BOOK{Socr1994,
  title = {Infrared and Raman characteristic group frequencies: tables and charts},
  publisher = {John Wiley \& Sons},
  year = {1994},
  author = {G. Socrates},
  edition = {2nd}
}

@MISC{Lightning,
  author = {J. R. Southern},
  title = {Toronto thunderstorm},
  howpublished = {Internet: \newline http://en.wikipedia.org/wiki/File:Krunkwerke\_-\_IMG\_4515\_\%28by-sa\%29.jpg
	(accessed 07-09-2009)},
  url = {http://en.wikipedia.org/wiki/File:Krunkwerke_-_IMG_4515_%28by-sa%29.jpg}
}

@CONFERENCE{Stal07,
  author = {O. Stalter and B. Burger and S. Lehrmann},
  title = {{Silicon Carbide (SiC) D-MOS for grid-feeding solar-inverters}},
  booktitle = {European Conference on Power Electronics and Applications, 2007},
  year = {2007},
  pages = {1\,-\,10},
  doi = {10.1109/EPE.2007.4417654},
  file = {:Allgemein\\Stalter-SiC-Inverters-2007.pdf:PDF},
  url = {http://dx.doi.org/10.1109/EPE.2007.4417654}
}

@ARTICLE{Star06,
  author = {S.M. Starikovskaia},
  title = {Plasma assisted ignition and combustion},
  journal = {J. Phys. D: Appl. Phys.},
  year = {2006},
  volume = {39},
  pages = {R265\,-\,R299},
  number = {16},
  doi = {10.1088/0022-3727/39/16/R01},
  file = {:DBD\\Starikovskaia-Streamer-overview-2006.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0022-3727/39/16/R01}
}

@ARTICLE{Step07,
  author = {K. Stephan and others},
  title = {Fast prototyping using a dry film photoresist: microfabrication of
	soft-lithography masters for microfluidic structures},
  journal = {J. Micromech. Microeng.},
  year = {2007},
  volume = {17},
  pages = {N69\,-\,N74},
  doi = {10.1088/0960-1317/17/10/N01},
  file = {:Photolacke\\Stephan-DFR-Etertec-HQ-2007.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/17/10/N01}
}

@ARTICLE{Stoe10,
  author = {U. Stöhr and others},
  title = {Porous photoresist stamps for selective plasma treatment},
  journal = {Plasma Processes Polym.},
  year = {2010},
  volume = {7},
  pages = {9\,-\,15},
  number = {1},
  doi = {10.1002/ppap.200900063},
  file = {:DBD\\Stöhr-PlasmaStampSinterMetal-2010.pdf:PDF},
  url = {\newline http://dx.doi.org/10.1002/ppap.200900063}
}

@ARTICLE{Stoe09,
  author = {Uwe Stöhr and others},
  title = {Multilayer Photoresist Stamps for Selective Plasma Treatment in Micrometer
	Scales},
  journal = {Plasma Process. Polym.},
  year = {2009},
  volume = {6},
  pages = {228\,-\,233},
  number = {4},
  doi = {10.1002/ppap.200800217},
  file = {:DBD\\PlasmaPaper-Photoresist-finally-printed.pdf:PDF},
  url = {http://dx.doi.org/10.1002/ppap.200800217}
}

@ARTICLE{Stoe08,
  author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke},
  title = {High-resolution permanent photoresist laminate for microsystem applications},
  journal = {J. Micro/Nanolith. MEMS MOEMS},
  year = {2008},
  volume = {7},
  pages = {033009},
  doi = {10.1117/1.2964217},
  file = {:Photolacke\\TMMFPaperSPIE-2Draft.pdf:PDF},
  url = {http://dx.doi.org/10.1117/1.2964217}
}

@ARTICLE{Suk07,
  author = {J.W. Suk and J. Cho},
  title = {Capillary flow control using hydrophobic patterns},
  journal = {J. Micromech. Microeng.},
  year = {2007},
  volume = {17},
  pages = {N11\,-\,N15},
  number = {4},
  doi = {10.1088/0960-1317/17/4/N01},
  file = {:Allgemein\\Suk-hydrophobic-channels-2007.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/17/4/N01}
}

@ARTICLE{Tan06,
  author = {H.M.L. Tan and T. Akagi and T. Ichiki},
  title = {Localized Plasma Treatment of Poly(dimethylsiloxane) Surfaces and
	Its Application to Controlled Cell Cultivation},
  journal = {J. Photopolym. Sci. Technol.},
  year = {2006},
  volume = {19},
  pages = {245\,-\,250},
  doi = {10.2494/photopolymer.19.245},
  file = {:DBD\\Tan06-Plasmajet.pdf:PDF},
  url = {http://dx.doi.org/10.2494/photopolymer.19.245}
}

@MISC{LyX,
  author = {{The LyX Team}},
  title = {LyX 1.6.x},
  howpublished = {Internet: http://www.lyx.org},
  url = {http://www.lyx.org}
}

@ARTICLE{Ther03,
  author = {D. Therriault and S.R. White and J.A. Lewis},
  title = {Chaotic mixing in three-dimensional microvascular networks fabricated
	by direct-write assembly},
  journal = {Nature Materials},
  year = {2003},
  volume = {2},
  pages = {265\,-\,271},
  number = {4},
  doi = {10.1038/nmat863},
  file = {:Allgemein\\Therriault-Ink-Channels-2003.pdf:PDF},
  publisher = {Nature Publishing Group},
  url = {http://dx.doi.org/10.1038/nmat863}
}

@INPROCEEDINGS{Thom06,
  author = {M. Thomas and M. Eichler and C.-P. Klages},
  title = {Coating with Atmospheric Pressure Plasma Processes: From Large Area
	to \textmu{}-Structures},
  booktitle = {49th Annual Technical Conference Proceedings},
  year = {2006},
  organization = {Society of Vacuum Coaters},
  url = {http://tinyurl.com/Thomas06}
}

@ARTICLE{Thom07,
  author = {M. Thomas and M. von Hausen and C.-P. Klages and P. Baumhof},
  title = {Generation of Stable Coatings with Carboxylic Groups by Copolymerization
	of {MAA} and {VTMS} using {DBD} at Atmospheric Pressure},
  journal = {Plasma Process. Polym.},
  year = {2007},
  volume = {4},
  pages = {S475\,-\,S481},
  doi = {10.1002/ppap.200731210},
  file = {:DBD\\Thomas-Carboxy-groups-2007.pdf:PDF},
  publisher = {WILEY-VCH Verlag Weinheim},
  url = {http://dx.doi.org/10.1002/ppap.200731210}
}

@BOOK{Town1915,
  title = {Electricity in Gases},
  publisher = {Clarendon Press},
  year = {1915},
  author = {J.S. Townsend},
  url = {http://www.worldcat.org/wcpa/oclc/4294747}
}

@BOOK{Town1910,
  title = {The Theory of Ionization of Gases by Collision},
  publisher = {Constable},
  year = {1910},
  author = {J.S. Townsend},
  url = {http://www.worldcat.org/wcpa/oclc/8460026}
}

@ARTICLE{Tsai06-2,
  author = {Y.-C. Tsai and H.-P. Jen and K.-W. Lin and Y.-Z. Hsie},
  title = {Fabrication of microfluidic devices using dry film photoresist for
	microchip capillary electrophoresis},
  journal = {J. Chromatogr. A},
  year = {2006},
  volume = {1111},
  pages = {267\,-\,271},
  doi = {0.1016/j.chroma.2005.12.003},
  file = {AF-5000-Photolack-2.pdf:Photolacke\\AF-5000-Photolack-2.pdf:PDF},
  url = {http://dx.doi.org/10.1016/j.chroma.2005.12.003}
}

@ARTICLE{Tsai06-1,
  author = {Y.-C. Tsai and S.-J. Yang and H.-T. Lee and H.-P. Jen and Y.-Z. Hsieh},
  title = {Fabrication of a Flexible and Disposable Microreactor Using a Dry
	Film Photoresist},
  journal = {J. Chin. Chem. Soc.},
  year = {2006},
  volume = {53},
  pages = {683\,-\,688},
  file = {AF-5000-Photolack.pdf:Photolacke\\AF-5000-Photolack.pdf:PDF},
  url = {http://nr.stpi.org.tw/ejournal/ChiChemSociety/2006/EJ52-2006-683.pdf}
}

@ARTICLE{Uden1972,
  author = {S. Udenfriend and others},
  title = {Fluorescamine: A Reagent for Assay of Amino Acids, Peptides, Proteins,
	and Primary Amines in the Picomole Range},
  journal = {Science},
  year = {1972},
  volume = {178},
  pages = {871\,-\,872},
  doi = {10.1126/science.178.4063.871},
  file = {:Allgemein\\Udenfriend-Fluorescamine-1972.pdf:PDF},
  url = {http://dx.doi.org/10.1126/science.178.4063.871}
}

@ARTICLE{Velt05,
  author = {T. Velten and others},
  title = {Packaging of Bio-MEMS: Strategies, Technologies, and Applications},
  journal = {IEEE trans. adv. packag.},
  year = {2005},
  volume = {28},
  pages = {533\,-\,546},
  doi = {10.1109/TADVP.2005.858427},
  file = {Velten05-review.pdf:Photolacke\\Velten05-review.pdf:PDF},
  url = {http://dx.doi.org/10.1109/TADVP.2005.858427}
}

@ARTICLE{Vora05,
  author = {K.D. Vora and B.Y. Shew and E.C. Harvey and J.P. Hayes and A.G. Peele},
  title = {{Specification of mechanical support structures to prevent SU-8 stiction
	in high aspect ratio structures}},
  journal = {J. Micromech. Microeng.},
  year = {2005},
  volume = {15},
  pages = {978\,-\,983},
  doi = {10.1088/0960-1317/15/5/012},
  file = {SU-8-Aspektverhaeltnis-jmm2005.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm2005.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/15/5/012}
}

@CONFERENCE{Vult07,
  author = {P. Vulto and G. Igel and G.A. Urban},
  title = {Full wafer fabrication process for microfluidic glass chips with
	electroplated electrodes},
  booktitle = {Solid-State Sensors, Actuators and Microsystems Conference, 2007.
	TRANSDUCERS 2007.},
  year = {2007},
  pages = {117\,-\,120},
  doi = {10.1109/SENSOR.2007.4300085},
  file = {:Photolacke\\Vult07.pdf:PDF},
  journal = {Solid-State Sensors, Actuators and Microsystems Conference, 2007.
	TRANSDUCERS 2007.},
  url = {http://ieeexplore.ieee.org/xpls/abs\_all.jsp?arnumber=4300085}
}

@INPROCEEDINGS{Vult06-2,
  author = {P. Vulto and C. Klaunick and G. Igel and G. Urban},
  title = {{tmRNA} purification by electrophoretic filtration for genomic identification
	of bacteria on-a-chip},
  booktitle = {Proceedings of \textmu{}TAS 2006},
  year = {2006},
  volume = {2},
  pages = {377\,-\,379},
  file = {:Photolacke\\tmRNA purification - MicroTAS2006.pdf:PDF}
}

@ARTICLE{Vult06,
  author = {P. Vulto and others},
  title = {Selective sample recovery of DEP-separated cells and particles by
	phaseguide-controlled laminar flow},
  journal = {J. Micromech. Microeng.},
  year = {2006},
  volume = {16},
  pages = {1847\,-\,1853},
  doi = {10.1088/0960-1317/16/9/013},
  file = {Vult06.pdf:Photolacke\\Vult06.pdf:PDF},
  url = {http://dx.doi.org/10.1088/0960-1317/16/9/013}
}

@ARTICLE{Vult05,
  author = {P. Vulto and others},
  title = {Microfluidic channel fabrication in dry film resist for production
	and prototyping of hybrid chips},
  journal = {Lab on a Chip},
  year = {2005},
  volume = {5},
  pages = {158\,-\,162},
  doi = {10.1039/b411885e},
  file = {Vulto-Ordyl.pdf:Photolacke\\Vulto-Ordyl.pdf:PDF},
  url = {http://dx.doi.org/10.1039/b411885e}
}

@ARTICLE{Wang06,
  author = {C. Wang and X. He},
  title = {Polypropylene surface modification model in atmospheric pressure
	dielectric barrier discharge},
  journal = {Surface \& Coatings Technology},
  year = {2006},
  volume = {201},
  pages = {3377\,-\,3384},
  number = {6},
  doi = {10.1016/j.surfcoat.2006.07.205},
  file = {:DBD\\Wang-PP-Contact-Angle-2006.pdf:PDF},
  publisher = {Elsevier},
  url = {http://dx.doi.org/10.1016/j.surfcoat.2006.07.205}
}

@CONFERENCE{Wash05,
  author = {Y. Washio and others},
  title = {Multilayer ultra thick resist development for {MEMS}},
  booktitle = {Proceedings of SPIE},
  year = {2005},
  volume = {5753},
  pages = {959},
  doi = {10.1117/12.600227},
  url = {http://dx.doi.org/10.1117/12.600227}
}

@ARTICLE{Will04,
  author = {J.D. Williams and W. Wang},
  title = {Microfabrication of an electromagnetic power relay using {SU-8 based
	UV-LIGA} technology},
  journal = {Microsystem Technologies},
  year = {2004},
  volume = {10},
  pages = {699\,-\,705},
  doi = {10.1007/s00542-004-0396-1},
  file = {SU-8-Aspektverhaeltnis-2.pdf:Photolacke\\SU-8-Aspektverhaeltnis-2.pdf:PDF},
  url = {http://dx.doi.org/10.1007/s00542-004-0396-1}
}

@ARTICLE{Xu07,
  author = {X. Xu and L. Li and S. Wang and L. Zhao and T. Ye},
  title = {Deposition of $\mathrm{SiO_x}$ films with a capacitively-coupled
	plasma at atmospheric pressure},
  journal = {Plasma Sources Sci. Technol.},
  year = {2007},
  volume = {16},
  pages = {372\,-\,376},
  number = {2},
  doi = {10.1088/0963-0252/16/2/021},
  file = {:DBD\\Xu-SiOx-DBD-2007.pdf:PDF},
  publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
	c1991-},
  url = {http://dx.doi.org/10.1088/0963-0252/16/2/021}
}

@ARTICLE{Yama1996,
  author = {K. Yamada and T. Haraguchi and T. Kajiyama},
  title = {Plasma-graft polymerization of vinyl monomers with reactive groups
	onto a surface of poly (p-phenylene terephthalamide) fiber},
  journal = {J. Appl. Polym. Sci.},
  year = {1996},
  volume = {60},
  pages = {1847\,-\,1853},
  number = {11},
  doi = {10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L},
  file = {:DBD\\Yamada-epoxy-grafting-1996.pdf:PDF},
  publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
  url = {\href{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}}
}

@BOOK{Yasu05,
  title = {Luminous Chemical Vapor Deposition and Interface Engineering},
  publisher = {Marcel Dekker},
  year = {2005},
  editor = {Arthur T. Hubbard},
  author = {Hirotsugu Yasuda},
  volume = {122},
  series = {Surfactant Science Series},
  edition = {1st}
}

@ARTICLE{Yu06,
  author = {L. Yu and others},
  title = {Adhesive bonding with SU-8 at wafer level for microfluidic devices},
  journal = {J. Phys.: Conf. Ser.},
  year = {2006},
  volume = {34},
  pages = {776\,-\,781},
  doi = {10.1088/1742-6596/34/1/128},
  file = {Yu06.pdf:Photolacke\\Yu06.pdf:PDF},
  url = {http://dx.doi.org/10.1088/1742-6596/34/1/128}
}

@ARTICLE{Zhan04,
  author = {J. Zhang and M.B. Chan-Park and S.R. Conner},
  title = {Effect of exposure dose on the replication fidelity and profile of
	very high aspect ratio microchannels in {SU-8}},
  journal = {Lab on a Chip},
  year = {2004},
  volume = {4},
  pages = {646\,-\,653},
  doi = {10.1039/b403304c},
  file = {SU-8-Aspektverhaeltnis-Theorie.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Theorie.pdf:PDF},
  url = {http://dx.doi.org/10.1039/b403304c}
}

@ARTICLE{Zhan1995,
  author = {J. Zhang. and K. Kato and Y. Uyama and Y. Ikada},
  title = {Surface graft polymerization of glycidyl methacrylate onto polyethylene
	and the adhesion with epoxy resin},
  journal = {J. Polymer Sci. Polymer Chem.},
  year = {1995},
  volume = {33},
  pages = {2629\,-\,2638},
  number = {15},
  doi = {10.1002/pola.1995.080331509},
  file = {:DBD\\Zhang-epoxy-grafting-PE-1995.pdf:PDF},
  publisher = {John Wiley \& Sons, Inc. New York},
  url = {http://dx.doi.org/10.1002/pola.1995.080331509}
}

@ARTICLE{Zhao1999,
  author = {Y. Zhao and M.-W. Urban},
  title = {Spectroscopic studies of microwave plasma reactions of maleic anhydride
	on poly (vinylidene fluoride) surfaces: crystallinity and surface
	reactions},
  journal = {Langmuir},
  year = {1999},
  volume = {15},
  pages = {3538\,-\,3544},
  number = {10},
  doi = {10.1021/la981310m},
  file = {:DBD\\Zhao-Carboxy-on-PVDF-1999.pdf:PDF},
  url = {http://dx.doi.org/10.1021/la981310m}
}

@ARTICLE{Zou01,
  author = {X.P. Zou and E.T. Kang and K.G. Neoh and C.Q. Cui and T.B. Lim},
  title = {Surface modification of poly (tetrafluoroethylene) films by plasma
	polymerization of glycidyl methacrylate for adhesion enhancement
	with evaporated copper},
  journal = {Polymer},
  year = {2001},
  volume = {42},
  pages = {6409\,-\,6418},
  number = {15},
  doi = {10.1016/S0032-3861(01)00113-6},
  file = {:DBD\\Zou-epoxy-2001.pdf:PDF},
  publisher = {Elsevier},
  url = {\href{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}}
}

@BOOK{CRC07,
  title = {CRC Handbook of Chemistry and Physics},
  publisher = {Taylor and Francis},
  year = {2007},
  editor = {David R. Lide},
  pages = {12-114},
  edition = {87th},
  file = {:DBD\\CRC-Work functions-2007.pdf:PDF},
  url = {http:/www.hbcpnetbase.com}
}

@STANDARD{ASTME1294,
  title = {{ASTM}~E~1294-89~(1999), Standard Test Method for Pore Size Characteristics
	of Membrane Filters Using Automated Liquid Porosimeter},
  organization = {ASTM International},
  url = {http://www.astm.org/DATABASE.CART/WITHDRAWN/E1294.htm}
}

@STANDARD{ISO10780,
  title = {{ISO}~10780:1994, Stationary source emissions -- Measurement of velocity
	and volume flowrate of gas streams in ducts},
  organization = {ISO},
  url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=18855}
}

@STANDARD{ISO4003,
  title = {{ISO}~4003:1977, Permeable sintered metal materials -- Determination
	of bubble test pore size},
  organization = {ISO},
  url = {\newline http://www.iso.org/iso/catalogue\_detail.htm?csnumber=9678}
}

@STANDARD{ISO4287,
  title = {{ISO}~4287~(1997), Geometrical Product Specifications Surface Texture
	Profile Method Terms, Definitions and Surface Texture Parameters},
  organization = {ISO},
  url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=10132}
}